Compact Ring Resonator Enhanced Silicon-MSM Photodetector in SiN-on-SOI Platform

TL;DR

This paper introduces a compact silicon-MSM photodetector integrated with a silicon nitride ring resonator on a SiN-on-SOI platform, achieving high responsivity and bandwidth for on-chip optical applications.

Contribution

It reports the first integration of a silicon nitride resonator with a silicon-MSM photodetector on a SiN-on-SOI platform, significantly enhancing responsivity and bandwidth.

Findings

Responsivity of 0.81 A/W at 850 nm wavelength.

Resonance provides 100x responsivity improvement.

Electro-optic bandwidth of 7.5 GHz.

Abstract

We present a compact on-chip resonator enhanced silicon-MSM photodetector in $850$ $nm$ wavelength band for communication and lab-on-chip bio-sensing applications. We report the highest responsivity of 0.81 A/W for a 5 $\mu m$ long device. High responsivity is achieved by integrating the detector in a silicon nitride ring resonator. The resonance offers 100X responsivity improvement over a single-pass photodetector due to cavity enhancement. We also present a detailed study of the high-speed response of the cavity and single-pass detector. We report an electro-optic bandwidth of 7.5 GHz measured using a femtosecond optical excitation. To the best of our knowledge, we report for the first time silicon nitride resonator integrated Si-MSM detector in SiN-SOI platform.