Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics

TL;DR

This paper demonstrates that laboratory grazing-incidence X-ray fluorescence spectroscopy can reliably analyze sub-nanometer CrSc multilayer water window optics, offering a non-destructive method for elemental depth profiling crucial for manufacturing improvements.

Contribution

It introduces a non-destructive, laboratory-based technique for elemental depth profiling of ultra-thin multilayer optics, validated against synchrotron measurements.

Findings

Successful non-destructive elemental depth profiling of sub-nanometer layers.

Laboratory equipment results agree with synchrotron measurements.

Potential for rapid, reliable analysis in multilayer optics manufacturing.

Abstract

Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II confirm the results and prove the potential of laboratory equipment for the reliable analysis of stratified materials with sub-nanometer layer thicknesses.