Highly Accurate Determination of Heterogeneously Stacked Van-der-Waals Materials by Optical Microspectroscopy
Andreas Hutzler, Birk Fritsch, Christian D. Matthus, Michael P. M., Jank, Mathias Rommel

TL;DR
This paper presents a hybrid optical microspectroscopy method with an analytical model for highly accurate, non-destructive identification and quantification of layered 2D materials like graphene and hBN in heterostructures.
Contribution
It introduces a novel hybrid evaluation scheme combined with an analytical transfer matrix model for precise analysis of Van-der-Waals heterostructures using optical microspectroscopy.
Findings
Accurately quantifies layer numbers of graphene and hBN.
Differentiates materials based on reflectance deviations and spectral shifts.
Proves high accuracy in complex heterostructure analysis.
Abstract
The composition of Van-der-Waals heterostructures is conclusively determined using a hybrid evaluation scheme of data acquired by optical microspectroscopy. This scheme deploys a parameter set comprising both change in reflectance and wavelength shift of distinct extreme values in reflectance spectra. Furthermore, the method is supported by an accurate analytical model describing reflectance of multilayer systems acquired by optical microspectroscopy. This approach allows uniquely for discrimination of 2D materials like graphene and hBN and, thus, quantitative analysis of Van-der-Waals heterostructures containing structurally very similar materials. The physical model features a transfer matrix method which allows for flexible, modular description of complex optical systems and may easily be extended to individual setups. It accounts for numerical apertures of applied objective lenses…
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