Micro-Raman spectroscopy of ultrashort laser induced microexplosion sites in silicon
L. A. Smillie, M. Niihori, L. Rapp, B. Haberl, J. S. Williams, J. E., Bradby, C. J. Pickard, A. V. Rode

TL;DR
This study uses micro-Raman spectroscopy to identify and analyze various silicon phases created by ultrashort laser-induced microexplosions, revealing new allotropes with potential semiconducting applications.
Contribution
It provides the first Raman spectroscopic evidence of multiple novel silicon allotropes formed by laser microexplosions, expanding understanding of laser-induced phase transformations in silicon.
Findings
Identification of multiple silicon phases including r8, bc8, and bt8-Si.
Residual stresses up to 4.5 GPa in laser-modified silicon.
Detection of unknown silicon phases with potential semiconducting properties.
Abstract
Confined microexplosions induced in silicon by powerful ultrashort laser pulses can lead to new Si phases. Some of these have not previously been observed via near-equilibrium compression of silicon. In this study, confocal Raman micro-spectroscopy and Raman imaging of arrays of microexplosions have been conducted to search for Raman signatures of these novel allotropes of silicon. A microexplosion is generated at the interface between a thick silicon dioxide confinement layer and underlying silicon. It is characterised by a void at the interface above a region of compressed silicon. Raman data show a rich assembly of silicon phases within the modified silicon. Residual stresses up to 4.5 GPa in the modifications have been determined from the shift in the main diamond-cubic Si Raman peak. The computed Raman spectra for a number of Si allotropes show reasonable agreement with the…
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Taxonomy
TopicsLaser Material Processing Techniques · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
