Spectrally Broadband Electro-Optic Modulation with Nanoelectromechanical String Resonators

TL;DR

This paper introduces a broadband electro-optic modulator using nanoelectromechanical silicon nitride string resonators that achieve high modulation depth at low voltages and tunable frequencies.

Contribution

The work demonstrates a novel electro-optical modulator based on nanoelectromechanical strings with high modulation depth and frequency tunability in the nonlinear regime.

Findings

Achieves nearly 100% optical modulation depth at <1 mV

Operates at frequencies from hundreds of kHz to several MHz

Enables frequency tuning without loss of modulation depth

Abstract

In this paper, we present an electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate thewidth of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.