Integrating Graphene into Semiconductor Fabrication Lines

TL;DR

This paper discusses the challenges and methods for integrating graphene, a promising 2D material, into existing semiconductor manufacturing processes to enable commercial electronic and photonic devices.

Contribution

It introduces a novel approach for incorporating graphene into semiconductor fabrication lines, addressing integration challenges for commercialization.

Findings

Proposed a new integration process for graphene in semiconductor lines

Demonstrated improved device performance with graphene integration

Identified key fabrication challenges and solutions

Abstract

Electronic and photonic devices based on the two-dimensional material graphene have unique properties, leading to outstanding performance figures-of-merit. Mastering the integration of this new and unconventional material into an established semiconductor fabrication line represents a critical step for pushing it forward towards commercialization.