Quantifying transmission electron microscopy irradiation effects using two-dimensional materials
Toma Susi, Jannik C. Meyer, Jani Kotakoski

TL;DR
This paper reviews recent advances in transmission electron microscopy and two-dimensional materials, emphasizing the physical understanding of electron-matter interactions at low energies for improved material characterization and manipulation.
Contribution
It provides a comprehensive summary of the physical principles underlying electron interactions with 2D materials, highlighting recent experimental and theoretical progress.
Findings
Enhanced understanding of electron-matter interactions at 15 keV
Insights into controlled atomic manipulation using electron irradiation
Advances in experimental and theoretical modeling of irradiation effects
Abstract
Important recent advances in transmission electron microscopy instrumentation and capabilities have made it indispensable for atomic-scale materials characterization. At the same time, the availability of two-dimensional materials has provided ideal samples where each atom or vacancy can be resolved. Recent studies have also revealed new possibilities for a different application of focused electron irradiation: the controlled manipulation of structures and even individual atoms. Evaluating the full range of future possibilities for this method requires a precise physical understanding of the interactions of electrons with energies as low as 15 keV now used in (scanning) transmission electron microscopy, becoming feasible due to advances both in experimental techniques and in theoretical models. We summarize the state of current knowledge of the underlying physical processes based on the…
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