Generation of Tin-Vacancy Centers in Diamond via Shallow Ion Implantation and Subsequent Diamond Overgrowth
Alison E. Rugar, Haiyu Lu, Constantin Dory, Shuo Sun, Patrick J., McQuade, Zhi-Xun Shen, Nicholas A. Melosh, Jelena Vu\v{c}kovi\'c

TL;DR
This paper presents a new technique for creating precisely located tin-vacancy centers in diamond, combining shallow ion implantation with diamond overgrowth, enabling better integration with nanophotonic devices.
Contribution
The authors develop a novel method for site-controlled SnV$^-$ center generation that avoids surface damage and produces clean spectra, suitable for quantum device integration.
Findings
Successful creation of site-controlled SnV$^-$ centers in diamond.
Method yields high-quality bulk spectra without damage.
Technique is adaptable to other color centers and device fabrication.
Abstract
Group-IV color centers in diamond have garnered great interest for their potential as optically active solid-state spin qubits. Future utilization of such emitters requires the development of precise site-controlled emitter generation techniques that are compatible with high-quality nanophotonic devices. This task is more challenging for color centers with large group-IV impurity atoms, which are otherwise promising because of their predicted long spin coherence times without a dilution refrigerator. For example, when applied to the negatively charged tin-vacancy (SnV) center, conventional site-controlled color center generation methods either damage the diamond surface or yield bulk spectra with unexplained features. Here we demonstrate a novel method to generate site-controlled SnV centers with clean bulk spectra. We shallowly implant Sn ions through a thin implantation mask…
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