Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit?
Phillip Manley, Sebastian Walde, Sylvia Hagedorn, Martin, Hammerschmidt, Sven Burger, Christiane Becker

TL;DR
This study models the impact of nanopatterned sapphire substrates on deep-UV LED light extraction, revealing that optical benefits are limited unless p-side losses are minimized, and emphasizing the importance of transparent p-sides and reflective contacts.
Contribution
The paper introduces a comprehensive optical model for DUV-LEDs with nanostructured substrates, providing design guidelines and quantifying conditions for efficiency improvements.
Findings
Nanostructuring has negligible benefit if p-side absorption dominates.
Reducing p-side losses to 20% can increase light extraction from 7.8% to 25%.
Using a Lambertian reflector further boosts efficiency to 34.2%.
Abstract
Light emitting diodes (LEDs) in the deep ultra-violet (DUV) offer new perspectives for multiple applications ranging from 3D printing to sterilization. However, insufficient light extraction severely limits their efficiency. Nanostructured sapphire substrates in aluminum nitride based LED devices have recently shown to improve crystal growth properties, while their impact on light extraction has not been fully verified. We present a model for understanding the impact of nanostructures on the light extraction capability of DUV-LEDs. The model assumes an isotropic light source in the semiconductor layer stack and combines rigorously computed scattering matrices with a multilayer solver. We find that the optical benefit of using a nanopatterned as opposed to a planar sapphire substrate to be negligible, if parasitic absorption in the p-side of the LED is dominant. If losses in the p-side…
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