Fast Fitting of Reflectivity Data of Growing Thin Films Using Neural Networks
Alessandro Greco, Vladimir Starostin, Christos Karapanagiotis,, Alexander Hinderhofer, Alexander Gerlach, Linus Pithan, Sascha Liehr, Frank, Schreiber, Stefan Kowarik

TL;DR
This paper demonstrates that a simple neural network can rapidly predict thin film properties from X-ray reflectivity data with high accuracy, significantly reducing computation time and user input compared to traditional methods.
Contribution
The study introduces a neural network approach for fast, accurate prediction of thin film parameters from XRR data, outperforming classical fitting methods in speed and requiring minimal user input.
Findings
Neural network achieves 8-18% mean absolute percentage error.
Model predicts film thickness, roughness, and density rapidly.
Method reduces computation time to milliseconds.
Abstract
X-ray reflectivity (XRR) is a powerful and popular scattering technique that can give valuable insight into the growth behavior of thin films. In this study, we show how a simple artificial neural network model can be used to predict the thickness, roughness and density of thin films of different organic semiconductors (diindenoperylene, copper(II) phthalocyanine and -sexithiophene) on silica from their XRR data with millisecond computation time and with minimal user input or a priori knowledge. For a large experimental dataset of 372 XRR curves, we show that a simple fully connected model can already provide good predictions with a mean absolute percentage error of 8-18 % when compared to the results obtained by a genetic least mean squares fit using the classical Parratt formalism. Furthermore, current drawbacks and prospects for improvement are discussed.
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