Geometrical Nonlinearity of Circular Plates and Membranes: an Alternative Method
D. Cattiaux, S. Kumar, X. Zhou, A. Fefferman, E. Collin

TL;DR
This paper introduces an analytical method to evaluate geometrical nonlinearities in circular micro/nano-mechanical structures, extending existing beam theories to non-axisymmetric modes without complex numerical computations.
Contribution
It develops a simple, analytical approach for nonlinear modeling of circular plates and membranes, applicable to non-axisymmetric modes and independent of drive scheme assumptions.
Findings
Analytic expression for Duffing nonlinear coefficient derived
Method validated against experimental and theoretical results
Framework applicable to mode-coupling in nonlinear dynamics
Abstract
We apply the well-established theoretical method developed for geometrical nonlinearities of micro/nano-mechanical clamped beams to circular drums. The calculation is performed under the same hypotheses, the extra difficulty being to analytically describe the (coordinate-dependent) additional stress generated in the structure by the motion. Specifically, the model applies to non-axisymmetric mode shapes. An analytic expression is produced for the Duffing (hardening) nonlinear coefficient, which requires only the knowledge of the mode shape functions to be evaluated. This formulation is simple to handle, and does not rely on complex numerical methods. Moreover, no hypotheses are made on the drive scheme and the nature of the in-plane stress: it is not required to be of electrostatic origin. We confront our predictions with both typical experimental devices and relevant theoretical…
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Taxonomy
TopicsMechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Force Microscopy Techniques and Applications
