Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator

TL;DR

This paper demonstrates a CMOS-compatible, chip-scale MEMS resonator capable of generating over 100 harmonic tones, with digital control post-fabrication, enabling compact and integrated high-order harmonic generation.

Contribution

It introduces the first record-high harmonic generation over 100 tones using a nonlinear MEMS resonator with digital control, advancing integrated harmonic generation technology.

Findings

Generated over 100 harmonic tones in a MEMS resonator

Achieved operation at CMOS-compatible voltage levels

Enabled digital post-fabrication control of harmonics

Abstract

A fully electrically interfaced chip-scale Micro-Electro-Mechanical System based higher-order harmonic generator has multitudes of applications as it can simultaneously facilitate monolithic integration with on-chip electronics and offer microscopic footprint in comparison with the bulky and expensive high-order harmonic generation setup in optics. Here we report the first demonstration of a record-high harmonics generation over 100 tones using a thin-film Lead Zirconate Titanate flexural mode microresonator operating at CMOS compatible voltage levels. The harmonics can be befittingly controlled digitally post-fabrication as well.