Self-Rolled Multilayer Metasurfaces

TL;DR

This paper introduces a rapid, cost-effective method for fabricating multilayer metasurfaces using a self-rolling technique, enabling complex 3D optical devices with simplified manufacturing.

Contribution

The authors develop a single-step nanopatterning process to create multilayer metasurfaces, reducing fabrication complexity and enabling new device configurations.

Findings

Successfully fabricated MLMs with nanohole and nanorod patterns

Demonstrated circular polarization selectivity in angled MLMs

Reduced fabrication time compared to traditional layer-by-layer methods

Abstract

Multilayer metasurfaces (MLMs) represent a versatile type of three-dimensional optical metamaterials that could enable ultra-thin and multi-functional photonic components. Herein we demonstrate an approach to readily fabricate MLMs exploiting a thin film self-rolling technique. As opposed to standard layer-by-layer approaches, all the metasurfaces are defined within a single nanopatterning step, significantly reducing fabrication time and costs. We realize two MLMs platforms relying on widely used nanopatterning techniques, namely focused ion-beam and electron-beam lithographies. A first example are MLMs comprised of nanohole patterns structured into metal-dielectric seed bilayers. The second platform is comprised of vertical stacks of angled plasmonic nanorod arrays separated by thin dielectric layers. Such angled MLMs exhibit a selective response to circularly polarized light, in agreement with previous works relying on layer-by-layer processes. Our approach can pave the way for the efficient prototyping of novel MLMs, such as devices with varying number of layers and configurations that can be fabricated on a single chip.