Super-Planckian Radiative Heat Transfer between Macroscale Plates with Vacuum Gaps Down to 190 nm Directly Created by SU-8 Posts and Characterized by Capacitance Method

TL;DR

This study experimentally demonstrates super-Planckian near-field radiative heat transfer between macroscale silicon plates with vacuum gaps as small as 190 nm, using SU-8 posts for gap creation and capacitance measurements for characterization.

Contribution

It introduces a precise fabrication and measurement method for near-field thermal radiation enhancement at nanoscale gaps, validated by theoretical models.

Findings

Radiative heat transfer exceeds blackbody limit by 11 times.

Vacuum gaps as small as 190 nm achieved and characterized.

Enhancement mainly due to coupled surface plasmon polaritons.

Abstract

In this work we experimentally demonstrated the near-field thermal radiation enhancement over the blackbody limit by 11 times between highly doped silicon chips with 1x1 cm2 size at a vacuum gap distance of 190 nm under a temperature difference of 74.7 K above room temperature. SU-8 polymer posts, which significantly reduced the conduction less than 6% of the total heat transfer due to its low thermal conductivity, were carefully fabricated with different heights to directly create vacuum gaps from 507 nm down to 190 nm precisely determined in-situ by capacitance measurement. Experimental results were validated by theoretical calculations based on fluctuational electrodynamics, which revealed the enhancement mechanism mainly as coupled surface plasmon polariton. The experimental method developed here will facilitate the potential applications of near-field radiative devices made of electrically conductive materials like metals, graphene, and transparent conductive oxide besides heavily doped semiconductors for thermal energy conversion, radiative thermal rectification, and radiative heat modulation.