Mathematical Modelling and Comparative Study of Elliptical and Circular Capacitive Pressure Microsensor
Rishabh Bhooshan Mishra, S. Santosh Kumar
TL;DR
This paper develops mathematical models and simulations for elliptical capacitive pressure sensors, comparing their performance with circular sensors, and finds elliptical sensors offer better linearity within the same overlapping area.
Contribution
It provides the first detailed mathematical formulation and simulation comparison of elliptical versus circular capacitive pressure sensors.
Findings
Elliptical sensors exhibit better linearity than circular sensors.
Performance parameters are analyzed over an 18 kPa pressure range.
Comparison is based on sensors with identical overlapping plate areas.
Abstract
A lot of work on clamped circular, square and rectangular shaped capacitive pressure sensor has been carried out. However, to the best of our knowledge, no elaborate work has been performed on mathematical formulation and simulation of clamped elliptical shaped capacitive pressure sensor in literature. This paper describes the mathematical modelling and simulation of normal mode clamped elliptical shaped capacitive pressure sensor. The study of various performance parameters like maximum diaphragm deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and non-linearity is also carried out for operating pressure range of 0 kPa to 18 kPa. For circular capacitive pressure sensor, the operating pressure range is modified according to physical dimensions i.e. thickness and radius of diaphragm, separation gap between plates and maximum deflection. For same…
Peer Reviews
No public reviews on file for this paper yet. If you reviewed it on a platform where reviews are public (OpenReview, ICLR, NeurIPS, ICML), you can paste yours below so the community can read it here.
Videos
No videos yet. Explain this paper in a talk, walkthrough, or lecture? Add one.