Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging

TL;DR

This paper reports the development of a 20-element transition-edge sensor microcalorimeter array optimized for X-ray diffraction and Compton scattering, demonstrating promising energy resolution and fabrication techniques.

Contribution

It introduces a novel linear array design with strip geometry, detailing fabrication processes and performance characteristics for X-ray applications.

Findings

Energy resolution of 40-180 eV near 17 keV

Minimal impact of strip geometry on pulse response

Heat flow to the bath is geometry-dependent

Abstract

We present a strip transition-edge sensor microcalorimeter linear array detector developed for energy dispersive X-ray diffraction imaging and Compton scattering applications. The prototype detector is an array of 20 transition-edge-sensors with absorbers in strip geometry arranged in a linear array. We discuss the fabrication steps needed to develop this array including Mo/Cu bilayer, Au electroplating, and proof-of-principle fabrication of long strips of SiNx membranes. We demonstrate minimal unwanted effect of strip geometry on X-ray pulse response, and show linear relationship of 1/pulse height and pulse decay times with absorber length. For the absorber lengths studied, preliminary measurements show energy resolutions of 40 eV to 180 eV near 17 keV. Furthermore, we show that the heat flow to the cold bath is nearly independent of the absorber area and depends on the SiNx membrane geometry.