An On-Chip Quad-Wavelength Pyroelectric Sensor for Spectroscopic Infrared Sensing

TL;DR

This paper presents a novel on-chip quad-wavelength pyroelectric sensor capable of spectroscopic infrared sensing, integrating photonic structures and sensors for practical applications like IR imaging and thermography.

Contribution

It introduces a multi-wavelength IR sensor with four narrowband spectral responses fabricated on a single chip, advancing integrated spectroscopic sensing technology.

Findings

Exhibits four distinct narrowband IR responses at designed resonances.

Operates effectively within the atmospheric IR window.

Potential for applications in IR spectroscopy and imaging.

Abstract

Merging photonic structures and optoelectronic sensors into a single chip may yield a sensor-on-chip spectroscopic device that can measure the spectrum of matters. In this work, we propose and realize an on-chip concurrent multi-wavelength infrared (IR) sensor. The fabricated quad-wavelength IR sensors exhibit four different narrowband spectral responses at normal incidence following the pre-designed resonances in the mid-wavelength infrared region that corresponds to the atmospheric window. The device can be applied for practical spectroscopic applications such as non-dispersive IR sensors, IR chemical imaging devices, pyrometers, and spectroscopic thermography imaging.