# High-precision local transfer of van der Waals materials on nanophotonic structures

## TL;DR

This paper introduces a high-precision dry transfer method using polycarbonate's glass transition temperature to accurately position van der Waals monolayers onto nanophotonic structures, enabling advanced quantum optics experiments.

## Contribution

The study presents a novel in situ point transfer technique that improves the precision and contamination-free placement of 2D materials on nanophotonic devices.

## Key findings

- Successful transfer of monolayers onto silicon nitride structures
- Demonstration of contamination-free, high-precision placement
- Potential for deterministic integration in quantum optics applications

## Abstract

Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an in situ point for the precise pickup of two dimensional materials. We transfer transition metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of the modified dry transfer method. Our improved local transfer technique is a necessary step for the deterministic integration of high-quality van der Waals materials onto nanocavities for the exploration of few-photon nonlinear optics on a high-throughput, nanofabrication-compatible platform.