Ultrasensitive charge detection utilizing coupled nonlinear micromechanical resonators
Xuefeng Wang, Dong Pu, Ronghua Huan, Xueyong Wei, Weiqiu Zhu

TL;DR
This paper presents a novel charge detection method using coupled nonlinear micromechanical resonators, achieving ultra-high sensitivity at room temperature, and offering a simpler, more practical electrometer design.
Contribution
It introduces a new charge detection technique based on frequency drift in coupled nonlinear resonators, enabling high accuracy without complex setups.
Findings
Achieved 2.051E-3 fC charge resolution at room temperature.
Demonstrated application for ultra-low-frequency signal detection.
Provided a simple strategy for precise electron charge measurement.
Abstract
Since the discovery of electrons, an accurate detection of electrical charges has been the dream of scientific community. Due to some remarkable advantages, micro/nano-electromechanical systems (M/NEMS) based resonators have been used to design electrometers with exquisite sensitivity and resolution. Inevitably, some limits including requisite ultra-low environmental temperature, complicated resonator structure and measurement circuit, required linear dynamic response, will cause a gap with respect to practical application. Here, we demonstrate a novel ultra-sensitive charge detection based on the linear dependence of peak frequency drift on the coupling voltage variation of two coupled nonlinear micromechanical resonators. We achieved ultra-high resolution of 2.051E-3 fC (about 13 electrons) of charge detection at the room temperature. We also show an extra application of this device…
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Taxonomy
TopicsMechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies
