Phonon-laser sensing in a hetero optomechanical crystal cavity
Kaiyu Cui, Zhilei Huang, Qiancheng Xu, Fei Pan, Jian Xiong, Xue Feng,, Fang Liu, Wei Zhang, Yidong Huang

TL;DR
This paper demonstrates a silicon hetero optomechanical crystal cavity that supports phonon lasing, significantly enhancing on-chip sensing resolution and paving the way for high-precision, integrable sensors for various physical properties.
Contribution
Introduction of a silicon hetero optomechanical crystal cavity supporting phonon lasing with high optomechanical coupling and narrow linewidth, improving sensing resolution.
Findings
Achieved phonon lasing at 5.91 GHz in a silicon nanobeam cavity.
Enhanced sensing resolution to 1.0×10⁻⁸, surpassing conventional sensors.
Narrowed mechanical linewidth from 3.3 MHz to 5.2 kHz.
Abstract
Micro- and nanomechanical resonators have emerged as promising platforms for sensing a broad range of physical properties such as mass, force, torque, magnetic field, and acceleration. The sensing performance relies critically on the motional mass, the mechanical frequency, and the linewidth of the mechanical resonator. Here, we demonstrate a hetero optomechanical crystal (OMC) cavity based on a silicon nanobeam structure. The cavity supports phonon lasing in a fundamental mechanical mode with a frequency of 5.91 GHz, an effective mass of 116 fg, and a mechanical linewidth narrowing from 3.3 MHz to 5.2 kHz, while the optomechanical coupling rate of is as high as 1.9 MHz. With this phonon laser, the on-chip sensing with a resolution of / = 1.0*10-8 can be attained, which is at least two orders of magnitude larger than that obtained with conventional…
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Taxonomy
TopicsMechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Photonic and Optical Devices
