# Squeeze film pressure sensors based on SiN membrane sandwiches

## TL;DR

This paper introduces high-sensitivity squeeze film pressure sensors using silicon nitride membranes, demonstrating their effectiveness in measuring low pressures with high responsivity and potential for vacuum applications.

## Contribution

The study presents a novel pressure sensor design based on SiN membrane sandwiches and analyzes their mechanical response and gas coupling effects.

## Key findings

- High responsivity of several kHz/mbar
- Sub-pascal sensitivity achieved
- Effective in rarefied air and vacuum environments

## Abstract

We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10^-3-50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.