# High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

## TL;DR

This paper presents the design and experimental demonstration of high-frequency, resonant acousto-optic modulators fabricated using a MEMS foundry process, enabling GHz modulation with high efficiency for advanced optical applications.

## Contribution

It introduces a novel doubly-resonant cavity design in a MEMS platform that achieves GHz acousto-optic modulation with enhanced efficiency and potential for integrated optical devices.

## Key findings

- Achieved acousto-optic modulation at GHz frequencies
- Demonstrated high modulation efficiency in a MEMS-based device
- Potential applications in fast spatial light modulators and RF receivers

## Abstract

We report the design and characterization of high frequency, resonant acousto-optic modulators (AOM) in a MEMS foundry process. The doubly-resonant cavity design, with short ($L{\sim}10.5\, {\mu}m$) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators (SLM), low-cost integrated free space optical links and optically enhanced low-noise RF receivers.