# Time evolution of the process of doping of solids by plasma-ion beams

## TL;DR

This paper analyzes the time-dependent process of doping solids with plasma-ion beams, focusing on ion penetration, temperature increase, and dopant distribution, based on experimental data and numerical modeling.

## Contribution

It provides a mathematical analysis of plasma ion beam propagation and solid doping, incorporating experimental data to model temperature and dopant density evolution.

## Key findings

- Ion penetration and temperature growth are effectively modeled over time.
- Numerical calculations match experimental observations.
- Doping process dynamics are characterized by specific energy and time distributions.

## Abstract

Irradiation of a solid with intense plasma ion beams produced by Rod Plasma Injector is a strongly nonequilibrium process, which enables achieving a number of effects which are impossible to be achieved with other method. In the paper, the process of plasma ion beam propagation regarding its time and energy distributions and the process of ion penetration of solids, resulting with ion implementation and temperature growth have been analyzed mathematically on basis of experimental data. Results of numerical calculations have been presented concerning temperature and dopant density time evolution.

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Source: https://tomesphere.com/paper/1903.10783