# Molecular beam epitaxy growth of superconducting Sr2RuO4 films

## TL;DR

This paper demonstrates the successful growth of superconducting Sr2RuO4 films using oxide molecular beam epitaxy, optimizing conditions to achieve superconductivity and enabling further study of its unconventional superconducting properties.

## Contribution

First demonstration of superconducting Sr2RuO4 films via oxide MBE with optimized growth conditions for superconductivity.

## Key findings

- Superconducting Sr2RuO4 films with Tc up to 1.1 K achieved.
- Ru flux tuning is critical for optimal superconducting properties.
- Growth conditions influence film stoichiometry and transport behavior.

## Abstract

We report growth of superconducting Sr2RuO4 films by oxide molecular beam epitaxy (MBE). Careful tuning of the Ru flux with an electron beam evaporator enables us to optimize growth conditions including the Ru/Sr flux ratio and also to investigate stoichiometry effects on the structural and transport properties. The highest onset transition temperature of about 1.1 K is observed for films grown in a slightly Ru-rich flux condition in order to suppress Ru deficiency. The realization of superconducting Sr2RuO4 films via oxide MBE opens up a new route to study the unconventional superconductivity of this material.