# Photonic crystal nanobeam cavities with optical resonances around 800 nm

## TL;DR

This paper presents the design and fabrication of InGaP photonic crystal nanobeam cavities with optical resonances near 800 nm, suitable for atomic transitions, achieving quality factors up to 20,000.

## Contribution

The work introduces a new fabrication of InGaP nanobeam cavities with high quality factors around 800 nm for atomic transition applications.

## Key findings

- Achieved quality factors up to 2×10^4
- Designed cavities compatible with Rubidium, Cesium, Argon transitions
- Demonstrated fabrication of inline and side-coupled nanobeam cavities

## Abstract

We report on the design and the fabrication of 1D photonic crystal (PhC) nanobeam cavities with optical resonances around 800 nm, compatible with Rubidium, Cesium or Argon atomic transitions. The cavities are made of Indium Gallium Phosphide (InGaP) material, a III-V semi-conductor compound which has a large index of refraction ($n \simeq 3.3$) favoring strong optical confinement and small mode volumes. Nanobeam cavities with inline and side coupling have been designed and fabricated, and quality factors up to $2\times 10^4$ have been measured.