# Boron-10 conversion layer for ultra-cold neutron detection

## TL;DR

This paper presents a new 10B conversion layer optimized for ultra-cold neutron detection, demonstrating high efficiency and uniformity across a broad velocity range, fabricated via microwave plasma-assisted co-sputtering.

## Contribution

It introduces a novel multilayer titanium-boron-nickel film for ultra-cold neutron detection, fabricated directly on silicon sensors using a new co-sputtering technique.

## Key findings

- High and uniform detection efficiency over a large neutron velocity range
- Successful fabrication of multilayer films directly on silicon sensors
- Effective testing with cold and ultra-cold neutrons

## Abstract

We report on the development of a 10B conversion layer optimized for ultra-cold neutron detection with silicon detectors. The efficiency of this layer is high and roughly uniform over a large ultra-cold neutron velocity range. The designed titanium-boron-nickel multilayer film was deposited on silicon using a microwave plasma-assisted co-sputtering method (first, for test purpose, on silicon wafers, then directly on the surface of a CCD sensor). The obtained sensor was then tested using both cold and ultra-cold neutrons.