# Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip

## TL;DR

This paper presents a micro-machined nanoforce transducer with a pyramidal tip for improved nanomechanical testing of soft materials, achieving high force and depth resolution for quantitative measurements.

## Contribution

It introduces a novel MEMS-based nanoforce transducer with a FIB-made pyramidal tip, enhancing force resolution and enabling precise nanomechanical characterization of soft materials.

## Key findings

- Force resolution down to 1 nN achieved
- Able to measure elastic moduli of soft materials down to a few MPa
- Proof-of-principle setup successfully demonstrated

## Abstract

The quantitative nanomechanical characterization of soft materials using the nanoindentation technique requires further improvements in the performances of instruments, including their force resolution in particular. A micro-machined silicon nanoforce transducer based upon electrostatic comb drives featuring the force and depth resolutions down to 1 nN and 0.2 nm, respectively, is described. At the end of the MEMS transducers main shaft, a pyramidal tip is fabricated using a focused ion beam facility. A proof-of-principle setup with this MEMS nanoindenter has been established to measure the mechanical properties of soft polydimethylsiloxane. First measurement results demonstrate that the prototype measurement system is able to quantitatively characterize soft materials with elastic moduli down to a few MPa.

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Source: https://tomesphere.com/paper/1901.09701