# Quantifying Temperature-dependent Substrate Loss in GaN-on-Si RF Technology

## TL;DR

This paper evaluates how substrate resistivity affects temperature-dependent substrate loss in GaN-on-Si RF technology through experimental device simulations, providing benchmarks for different resistivities and geometries.

## Contribution

It introduces an experimentally validated simulation framework to quantify temperature-dependent substrate loss in GaN-on-Si RF devices, considering various resistivities and geometries.

## Key findings

- High resistivity Si substrates show pronounced temperature dependence above 150°C.
- GaN-on-high resistivity Si has lower substrate loss at frequencies above X-band.
- GaN-on-low resistivity Si is more temperature-insensitive and has lower substrate loss at lower frequencies.

## Abstract

Intrinsic limits to temperature-dependent substrate loss for GaN-on-Si technology, due to the change in resistivity of the substrate with temperature, are evaluated using an experimentally validated device simulation framework. Effect of room temperature substrate resistivity on temperature-dependent CPW line loss at various operating frequency bands are then presented. CPW lines for GaN-on-high resistivity Si are shown to have a pronounced temperature-dependence for temperatures above 150{\deg}C and have lower substrate losses for frequencies above the X-band. On the other hand, GaN-on-low resistivity Si is shown to be more temperature-insensitive and have lower substrate losses than even HR-Si for lower operating frequencies. The effect of various CPW geometries on substrate loss is also presented to generalize the discussion. These results are expected to act as a benchmark for temperature dependent substrate loss in GaN-on-Si RF technology.

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Source: https://tomesphere.com/paper/1901.09521