Tuning of envelope in high overtone bulk acoustic wave resonator

TL;DR

This paper demonstrates a high overtone bulk acoustic wave resonator (HBAR) capable of tuning its spectral envelope via dc bias, achieving high quality factors and broad frequency tunability in the microwave range.

Contribution

The study introduces a robust HBAR design with a tunable spectral envelope controlled by dc bias, showing high quality factors and broad frequency range operation.

Findings

Envelope tuning from 1.16 GHz to 1.90 GHz with bias

Quality factor exceeds 22,000 at 2 GHz

Relative envelope tunability around 64%

Abstract

This report presents a robust composite resonator known as the high overtone bulk acoustic wave resonator (HBAR) for demonstrating experimentally the ability of the resonator to tune the envelope of the spectrum by applying dc bias. The reported HBAR exhibits exceptionally high-quality factor in the frequency range of 700 MHz to 3 GHz and high effective coupling coefficient over the broad range of microwave frequencies. The HBAR is based on thin Ba0.5Sr0.5TiO3 film sandwiched between two electrodes forming a transducer, supported by a thick sapphire substrate which is a low acoustic loss material. The resonator works on the principle of induced piezoelectricity due to the applied dc bias. The minima of the envelope changes from 1.16 GHz with S11 of -3.51 dB at 100 kV/cm bias to 1.90 GHz with S11 of -42.23 dB at 700 kV/cm bias, giving a relative tunability of the envelope to be around 64%. The spacing of the parallel resonance frequency (SPRF) for different bias voltages are also presented in this report. The quality factor of the resonator is over 22,000 at around 2GHz.