Electrostatic enhancement factor for the coagulation of silicon nanoparticles in low-temperature plasmas
Benjamin Santos, Laura Cacot, Claude Boucher, Fran\c{c}ois Vidal

TL;DR
This study numerically investigates how electrostatic interactions, including polarization effects, enhance silicon nanoparticle coagulation in low-temperature plasmas, revealing significant effects even between like-charged particles.
Contribution
It introduces a rigorous multipole-based electrostatic interaction model for dielectric nanoparticles, improving understanding of coagulation enhancement mechanisms.
Findings
Polarization significantly enhances coagulation rates.
Like-charged particles can attract due to dielectric effects.
A simplified analytic potential is proposed for practical use.
Abstract
The coagulation enhancement factor due to electrostatic (Coulomb and polarization-induced) interaction between silicon nanoparticles was numerically computed for different nanoparticle sizes and charges in typical low-emperature argon-silane plasma conditions. We used a rigorous formulation, based on a multipole moment coefficients, to describe the complete electrostatic interaction between dielectric particles. The resulting interaction potential is non-singular at the contact point, which allows to adapt the orbital-motion limited theory to calculate the enhancement factor. It is shown that, due to induced polarization, coagulation is enhanced in neutral-charged particles encounters up to several orders of magnitude. Moreover, the short-range force between like-charged nanoparticles can become attractive as a direct consequence of the dielectric nature of the nanoparticles. The…
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