Growth and Characterization of Multi-Walled Carbon Nanotubes using Chemical Vapor Deposition

TL;DR

This paper explores the synthesis of multi-walled carbon nanotubes via chemical vapor deposition, examining how process variables and catalyst forms influence nanotube structure and enabling site-specific growth for device applications.

Contribution

It introduces a method using metal complex catalysts with spin-coating for site-selective growth of MWCNTs, advancing large-scale device fabrication capabilities.

Findings

Catalyst type significantly affects CNT structure and morphology.

Metal complex catalysts enable patterning and site-specific growth.

Growth models for different catalysts are proposed.

Abstract

In this study, the synthesis of multi-walled carbon nanotubes (MWCNTs) was carried out by chemical vapor deposition (CVD) using propane as the carbon source and Si as the catalyst support. The effect of CVD process variables such as temperature, choice of catalyst, etc on the growth behavior of nanotubes has been examined to understand the catalytic growth of CNTs. The transition metal catalysts, Fe and Ni, were used in both elemental metal form and in a metal complex form. In the case of elemental metal catalysts, the respective metals were deposited over the Si substrate using thermal evaporation following which nanotubes were synthesized by means of CVD. Subsequent studies of the synthesized carbon nanostructures employing elemental metal catalysts revealed a significant influence of the temperature and the catalyst material on the structure of CNTs. The CNTs synthesized using Ni catalyst were bamboo-like whereas the CNTs developed employing Fe catalyst were straight tubes with partial metal filling. Consequently, growth models for the different growth mechanisms have been proposed. Certain limitations of the above process have been overcome by employing spin-coating of a metal complex catalyst material on the Si substrate. The CVD synthesis of nanotubes using metal complex catalysts always resulted in partially catalyst filled CNTs. More importantly, the metal complex catalyst could be easily patterned on the Si substrate using spin-coating and photolithography, which resulted in site selective growth of partially catalyst filled MWCNTs. Since the entire process of site selective growth is suitable for conventional device fabrication, this method is a promising and practical pathway for large-scale fabrication of several magnetic material filled CNT-based devices.