Particle tracking of microelectromechanical system performance and reliability
Craig R. Copeland, Craig D. McGray, Jon Geist, and Samuel M. Stavis
TL;DR
This paper introduces an advanced particle tracking method to measure MEMS motion in real-time at nanometer and millisecond scales, revealing detailed dynamic behaviors to enhance understanding and reliability of MEMS devices.
Contribution
The paper develops a novel particle tracking technique for in-operando measurement of MEMS motion at nanometer and millisecond scales, enabling detailed analysis of dynamic behaviors.
Findings
Observed nearly perfect repeatability in MEMS motion
Detected transient feedback and stiction phenomena
Identified terminal failure modes in MEMS devices
Abstract
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.
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