Microscope Projection Photolithography Based on Ultraviolet Light-emitting Diodes

TL;DR

This paper presents a low-cost, compact microscope projection photolithography system using a UV LED as a light source, achieving sub-5 micron patterning suitable for educational and research applications.

Contribution

The study introduces a novel adaptation of a conventional microscope with a UV LED for projection photolithography, enhancing affordability and portability.

Findings

Achieved 5 micron line patterning with a 4X objective lens.

Line width close to diffraction limit, indicating potential for further miniaturization.

Demonstrated suitability for physics, chemistry, and biology research and education.

Abstract

We adapted a conventional microscope for projection photolithography using an ultraviolet (UV) light-emitting diode (LED) as a light source. The use of a UV LED provides the microscope projector with several advantages in terms of compactness and cost. The adapted microscope was capable of producing line patterns as wide as 5 um with the use of a 4X objective lens under optimal lithography conditions. The obtained line width is close to that of the diffraction limit, implying that the line width can be reduced further with the use of a higher resolution photomask and higher magnification objective lens. We expect that low-cost microscope projection photolithography based on a UV LED contribute to the field of physics education or various areas of research, such as chemistry and biology, in the future.