Flow sensor based on the snap-through detection of a curved micromechanical beam

TL;DR

This paper introduces a flow sensor that detects air velocity by measuring changes in snap-through voltage of a curved micromechanical beam, enabling sensitive, low-power flow measurement suitable for autonomous and environmental applications.

Contribution

It presents a novel flow sensing method based on snap-through detection of a curved micromechanical beam, with experimental validation and a predictive thermo-electro-mechanical model.

Findings

Snap-through voltage sensitivity of approximately 0.13 V s m$^{-1}$.

Power consumption around 360 μW.

Experimental results match model predictions.

Abstract

We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through voltage ($V_{ST}$). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of $dV_{\text{ST}}/du \approx0.13$ V s m$^{-1}$ with a power consumption of $\approx360\; \mu$W. Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors.