Cryogenic Characterization of 28 nm Bulk CMOS Technology for Quantum Computing

TL;DR

This study investigates the cryogenic behavior of 28 nm bulk CMOS technology, extracting physical parameters at various temperatures to enable the design of cryogenic analog/RF circuits for quantum computing.

Contribution

It provides the first experimental physical characterization of 28 nm CMOS at cryogenic temperatures and validates the EKV model for cryogenic behavior prediction.

Findings

Physical parameters extracted at 300K, 77K, 4.2K

EKV model accurately predicts cryogenic behavior

Enables design of cryogenic CMOS circuits for quantum computing

Abstract

This paper presents the first experimental investigation and physical discussion of the cryogenic behavior of a commercial 28 nm bulk CMOS technology. Here we extract the fundamental physical parameters of this technology at 300, 77 and 4.2 K based on DC measurement results. The extracted values are then used to demonstrate the impact of cryogenic temperatures on the essential analog design parameters. We find that the simplified charge-based EKV model can accurately predict the cryogenic behavior. This represents a main step towards the design of analog/RF circuits integrated in an advanced bulk CMOS process and operating at cryogenic temperature for quantum computing control systems.