Lithium niobate micro-disk resonators of quality factors above 10^7
Rongbo Wu, Jianhao Zhang, Ni Yao, Wei Fang, Lingling Qiao, Zhifang, Chai, Jintian Lin, and Ya Cheng
TL;DR
This paper presents a novel fabrication method for high-quality lithium niobate microresonators with quality factors exceeding 10^7, enabling enhanced nonlinear optical functionalities.
Contribution
It introduces a femtosecond laser micromachining and chemo-mechanical polishing technique for creating high-Q lithium niobate microdisks.
Findings
Quality factors above 10^7 achieved at 770 nm
Demonstrated second harmonic generation
Observed Raman scattering in the microdisk
Abstract
We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
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