Simultaneous measurement of multiple parameters of a subwavelength structure based on the weak value formalism

TL;DR

This paper extends the weak value formalism to enable simultaneous measurement of multiple parameters in optical experiments, achieving ultra-high resolution beyond the wavelength scale.

Contribution

It introduces a mathematical framework for multi-parameter weak value measurements and demonstrates its effectiveness in optical scatterometry.

Findings

Achieved measurement resolutions at least 1000 times smaller than the wavelength.

Validated the method with initial experiments on two parameters.

Showed that polarization control can optimize sensitivity.

Abstract

A mathematical extension of the weak value formalism to the simultaneous measurement of multiple parameters is presented in the context of an optical focused vector beam scatterometry experiment. In this example, preselection and postselection are achieved via spatially-varying polarization control, which can be tailored to optimize the sensitivity to parameter variations. Initial experiments for the two-parameter case demonstrate that this method can be used to measure physical parameters with resolutions at least 1000 times smaller than the wavelength of illumination.