Measuring Intra-pixel Sensitivity Variations of a CMOS Image Sensor
Swaraj Bandhu Mahato, Joris De Ridder, Guy Meynants, Gert Raskin, and, Hans Van Winckel

TL;DR
This paper presents a method to measure and map the intra-pixel sensitivity variations of a CMOS image sensor, enhancing photometric accuracy for scientific imaging applications.
Contribution
It introduces a forward modeling technique combined with optical measurements to accurately characterize intra-pixel sensitivity variations in CMOS sensors.
Findings
Quantified intra-pixel sensitivity variation of a CMOS sensor.
Validated the measurement method against Wiener deconvolution.
Provided detailed IPS maps for improved photometric correction.
Abstract
Some applications in scientific imaging, like space-based high-precision photometry, benefit from a detailed characterization of the sensitivity variation within a pixel. A detailed map of the intra-pixel sensitivity (IPS) allows to increase the photometric accuracy by correcting for the impact of the tiny sub-pixel movements of the image sensor during integration. This paper reports the measurement of the sub-pixel sensitivity variation and the extraction of the IPS map of a front-side illuminated CMOS image sensor with a pixel pitch of 6 \boldmath. Our optical measurement setup focuses a collimated beam onto the imaging surface with a microscope objective. The spot was scanned in a raster over a single pixel to probe the pixel response at each (sub-pixel) scan position. We model the optical setup in ZEMAX to cross-validate the optical spot profile described by an Airy…
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