Rolled-up self-assembly of compact magnetic inductors, transformers and resonators

TL;DR

This paper demonstrates the controlled self-assembly of ultrathin films into 3D microelectronic components like inductors and resonators, significantly reducing size and fabrication complexity.

Contribution

It introduces a method for rolling-up ultrathin films into functional 3D microelectronic devices with improved electrical performance and reduced footprint.

Findings

Achieved over 50-fold reduction in device footprint area.

Demonstrated electromagnetic resonators and coils with enhanced performance.

Validated the potential for scalable 3D microelectronic architectures.

Abstract

Three-dimensional self-assembly of lithographically patterned ultrathin films opens a path to manufacture microelectronic architectures with functionalities and integration schemes not accessible by conventional two-dimensional technologies. Among other microelectronic components, inductances, transformers, antennas and resonators often rely on three-dimensional configurations and interactions with electromagnetic fields requiring exponential fabrication efforts when downscaled to the micrometer range. Here, the controlled self-assembly of functional structures is demonstrated. By rolling-up ultrathin films into cylindrically shaped microelectronic devices we realized electromagnetic resonators, inductive and mutually coupled coils. Electrical performance of these devices is improved purely by transformation of a planar into a cylindrical geometry. This is accompanied by an overall downscaling of the device footprint area by more than 50 times. Application of compact self-assembled microstructures has significant impact on electronics, reducing size, fabrication efforts, and offering a wealth of new features in devices by 3D shaping.