Tensor Mixed Effects Model with Applications in Nanomanufacturing Inspection
Xiaowei Yue, Jin Gyu Park, Zhiyong Liang, Jianjun Shi

TL;DR
This paper introduces a tensor mixed effects (TME) model designed to analyze high-dimensional, multi-array Raman mapping data in nanomanufacturing, enabling separation of effects and efficient parameter estimation.
Contribution
The TME model is the first to handle mixed effects in tensor data, allowing for analysis of complex high-dimensional data with improved estimation methods.
Findings
TME model effectively separates fixed and random effects in tensor data.
The iterative double Flip-Flop algorithm provides efficient parameter estimation.
Numerical analysis confirms the model's accuracy and convergence.
Abstract
Raman mapping technique has been used to perform in-line quality inspections of nanomanufacturing processes. In such an application, massive high-dimensional Raman mapping data with mixed effects is generated. In general, fixed effects and random effects in the multi-array Raman data are associated with different quality characteristics such as fabrication consistency, uniformity, defects, et al. The existing tensor decomposition methods cannot separate mixed effects, and existing mixed effects model can only handle matrix data but not high-dimensional multi-array data. In this paper, we propose a tensor mixed effects (TME) model to analyze massive high-dimensional Raman mapping data with complex structure. The proposed TME model can (i) separate fixed effects and random effects in a tensor domain; (ii) explore the correlations along different dimensions; and (iii) realize efficient…
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Taxonomy
TopicsTensor decomposition and applications · Sparse and Compressive Sensing Techniques · Parallel Computing and Optimization Techniques
