Ultra-high Vacuum Deposition of Higher Manganese Silicide Mn4Si7 Thin Films
Rajendra P Dulal, Bishnu R Dahal, Ian L Pegg, John Philip

TL;DR
This paper reports the successful growth of Mn4Si7 thin films on silicon substrates using ultra-high vacuum deposition, revealing their crystal structure, magnetic, and electrical properties, which are relevant for electronic applications.
Contribution
First demonstration of Mn4Si7 thin films grown via ultra-high vacuum deposition with detailed structural and electrical characterization.
Findings
Films exhibit tetragonal crystal structure
Display paramagnetic behavior
Resistivity of 3.321 x 10^-5 ohm-m at room temperature
Abstract
We have successfully grown one of the higher manganese silicides, Mn4Si7 thin films on silicon (100) substrates using an ultra-high vacuum deposition with a base pressure of 1x10-9 torr. The thickness of the film was varied from 65-100 nm. These films exhibit a tetragonal crystal structure and display paramagnetic behavior as predicted for the stoichiometric Mn4Si7 system. They have a resistivity of 3.321 x 10-5 ohm-m at room temperature and show a semi-metallic nature.
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Taxonomy
TopicsSemiconductor materials and interfaces · Surface and Thin Film Phenomena · Copper Interconnects and Reliability
