3D reconstruction of the spatial distribution of dislocation loops using a triangulation approach
Hongbing Yu, Xiaoou Yi, Felix Hofmann

TL;DR
This paper introduces a triangulation-based method for reconstructing the 3D distribution of dislocation loops from 2D TEM micrographs, offering improved accuracy and efficiency over existing techniques.
Contribution
A novel triangulation approach that reduces the number of projections needed and enhances robustness in 3D dislocation loop reconstruction from TEM images.
Findings
Accurately reconstructs 3D dislocation distributions with fewer projections.
Less sensitive to angular coverage and contrast variations.
Comparable or better accuracy than weighted back-projection methods.
Abstract
We propose a new approach for reconstructing the 3D spatial distribution of small dislocation loops (DLs) from 2D TEM micrographs. This method is demonstrated for small DLs in tungsten, formed by low-dose ion-implantation, that appear as circular spots in diffraction contrast images. To extract the 3D position of specific DLs, their 2D position in multiple weak-beam dark-field TEM micrographs, recorded at different tilt angles, is fitted. From this fit the geometric centre and size of each DL in each micrograph can be extracted. Using a forward prediction approach each specific DL is identified in all the 2D projections. A system of linear equations can then be setup, linking the 3D position of each DL to its 2D position in each projection. If more than 2 projections are available this system of equations is over-determined, and the 3D position of each DL is found by least-squares…
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Taxonomy
TopicsIntegrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques · Advanced Electron Microscopy Techniques and Applications
