Microscale resolution thermal mapping using a flexible platform of patterned quantum sensors

TL;DR

This paper presents a scalable method to create nanodiamond-based thermal sensors with microscale resolution, enabling detailed temperature mapping of electronic devices with high accuracy and minimal interference.

Contribution

It introduces a novel fabrication approach for nanodiamond sensor arrays with high yield and customizable density, suitable for precise thermal imaging in microelectronics.

Findings

Successfully fabricated nanodiamond sensor arrays with up to 100% yield.

Demonstrated accurate temperature mapping of a coplanar waveguide.

Achieved high photoluminescence signals for sensitive temperature detection.

Abstract

Temperature sensors with micro- and nanoscale spatial resolution have long been explored for their potential to investigate the details of physical systems at an unprecedented scale. In particular, the rapid miniaturization of transistor technology, with the associated steep boost in power density, calls for sensors that accurately monitor heating distributions. Here, we report on a simple and scalable fabrication approach, based on directed self-assembly and transfer printing techniques, to construct arrays of nanodiamonds containing temperature sensitive fluorescent spin defects. The nanoparticles are embedded within a low thermal conductivity matrix that allows for repeated use on a wide range of systems with minimal spurious effects. Additionally, we demonstrate access to a wide spectrum of array parameters ranging from sparser single particle arrays to denser devices with approximately 100 % yield and stronger photoluminescence signal, ideal for temperature measurements. With these we experimentally reconstruct the temperature map of an operating coplanar waveguide to confirm the accuracy of these platforms.