# MultiSIMNRA: a computational tool for self-consistent ion beam analysis using SIMNRA

## TL;DR

MultiSIMNRA is a computational tool that enhances ion beam analysis by enabling self-consistent interpretation of energy spectra from multiple techniques using parallel SIMNRA sessions.

## Contribution

It introduces a novel method for self-consistent analysis in ion beam analysis by leveraging parallel SIMNRA sessions, improving accuracy and reliability.

## Key findings

- Successful application to multielemental thin film analysis
- Demonstrates feasibility and potential of self-consistent analysis
- Highlights advantages over traditional single-technique analysis

## Abstract

SIMNRA is widely adopted by the scientific community of ion beam analysis for interpretation of nuclear scattering analysis. Taking advantage of its recognized reliability and quality of the simulations, we developed a computer program that use parallel sessions of SIMNRA to perform self-consistent analysis for energy spectra of a given sample obtained using different techniques or experimental setups. In this paper, we present a result using MultiSIMNRA on self-consistent analysis for a multielemental thin film produced by magnetron sputtering. The results demonstrate the potentialities of the self-consistent analysis and its feasibility when using MultiSIMNRA.