Strain effect in highly-doped n-type 3C-SiC-on-glass substrate for mechanical sensors and mobility enhancement

TL;DR

This study investigates the strain-induced changes in electrical properties of highly doped n-type 3C-SiC on glass, demonstrating high gauge factors and linear piezoresistive response suitable for MEMS sensors.

Contribution

It provides the first experimental and theoretical analysis of the piezoresistive effect in n-type 3C-SiC on glass, highlighting its potential for flexible MEMS applications.

Findings

High gauge factors of -8.6 and 10.5 in longitudinal and transverse directions.

Excellent linearity and reproducibility of piezoresistive response after bending cycles.

Good agreement between experimental data and theoretical analysis of electron transfer phenomena.

Abstract

This work reports the strain effect on the electrical properties of highly doped n-type single crystalline cubic silicon carbide (3C-SiC) transferred onto a 6-inch glass substrate employing an anodic bonding technique. The experimental data shows high gauge factors of -8.6 in longitudinal direction and 10.5 in transverse direction along the [100] orientation. The piezoresistive effect in the highly doped 3C-SiC film also exhibits an excellent linearity and consistent reproducibility after several bending cycles. The experimental result was in good agreement with the theoretical analysis based on the phenomenon of electron transfer between many valleys in the conduction band of n-type 3C-SiC. Our finding for the large gauge factor in n-type 3C- SiC coupled with the elimination of the current leak to the insulated substrate could pave the way for the development of single crystal SiC-on-glass based MEMS applications.