Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging

TL;DR

This paper introduces a new diffractive shear interferometry technique for high-resolution, lensless imaging in the extreme ultraviolet range, enhancing accuracy, noise robustness, and convergence speed in coherent diffractive imaging.

Contribution

It presents a novel measurement and reconstruction method using sheared diffraction patterns, enabling spectrally resolved imaging at EUV wavelengths with improved performance.

Findings

Achieved high-resolution EUV imaging between 28-35 nm.

Demonstrated improved reconstruction accuracy and noise robustness.

Implemented Fourier-transform spectroscopy with phase-locked pulse pairs.

Abstract

We demonstrate a novel imaging approach and associated reconstruction algorithm for far-field coherent diffractive imaging, based on the measurement of a pair of laterally sheared diffraction patterns. The differential phase profile retrieved from such a measurement leads to improved reconstruction accuracy, increased robustness against noise, and faster convergence compared to traditional coherent diffractive imaging methods. We measure laterally sheared diffraction patterns using Fourier-transform spectroscopy with two phase-locked pulse pairs from a high harmonic source. Using this approach, we demonstrate spectrally resolved imaging at extreme ultraviolet wavelengths between 28 and 35 nm.