Low Vibration Laboratory with a Single-Stage Vibration Isolation for Microscopy Applications

TL;DR

This paper presents the design and performance of a low vibration laboratory utilizing a 100-ton floating foundation with passive pneumatic isolators, achieving vibration levels suitable for sensitive microscopy applications.

Contribution

It introduces an optimized pneumatic isolation system combined with a room-in-room concept for effective vibration, acoustic, and electromagnetic isolation in microscopy labs.

Findings

Vibration levels below 10 ng acceleration for most frequencies.

Successful implementation of a 100-ton floating foundation with passive pneumatic isolators.

Effective acoustic and electromagnetic isolation achieved.

Abstract

The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate is discussed. The optimization of the air spring system lead to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.