Monocrystalline free standing 3D yttrium iron garnet magnon nano resonators
F. Heyroth, C. Hauser, P. Trempler, P. Geyer, F. Syrowatka, R. Dreyer,, S.G. Ebbinghaus, G. Woltersdorf, and G. Schmidt

TL;DR
This paper reports the successful fabrication of free-standing 3D monocrystalline yttrium iron garnet nanoresonators with excellent magnetic properties, enabling advanced magnonic and nanomechanical applications.
Contribution
It introduces a novel fabrication process for free-standing 3D YIG nanoresonators with high-quality magnetic properties, advancing magnonics and nanostructure manufacturing.
Findings
Fabrication of free-standing monocrystalline YIG 3D nanoresonators.
Observation of low-damping spin wave excitations.
High-quality magnetic properties comparable to epitaxial films.
Abstract
Nano resonators in which mechanical vibrations and spin waves can be coupled are an intriguing concept that can be used in quantum information processing to transfer information between different states of excitation. Until now, the fabrication of free standing magnetic nanostructures which host long lived spin wave excitatons and may be suitable as mechanical resonators seemed elusive. We demonstrate the fabrication of free standing monocrystalline yttrium iron garnet (YIG) 3D nanoresonators with nearly ideal magnetic properties. The freestanding 3D structures are obtained using a complex lithography process including room temperature deposition and lift-off of amorphous YIG and subsequent crystallization by annealing. The crystallization nucleates from the substrate and propagates across the structure even around bends over distances of several micrometers to form e.g. monocrystalline…
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