Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

TL;DR

This paper introduces a novel method combining finite element Maxwell simulations with grazing-incidence X-ray fluorescence to accurately reconstruct the geometry and elemental composition of nanostructured surfaces.

Contribution

It extends finite element modeling to X-ray fluorescence analysis, enabling detailed reconstruction of complex nanostructured surfaces with elemental sensitivity.

Findings

Finite element Maxwell solver can model X-ray fluorescence in structured surfaces.

The method accurately reconstructs the geometry of nanostructured surfaces.

High elemental sensitivity is achieved in the reconstruction process.

Abstract

The geometry of a Si$_3$N$_4$ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finite elements are often used to model electrical field strengths for any 2D or 3D structures in the optical spectral range. We show that this approach can also be applied in the field of X-rays. The electrical field distribution obtained with the Maxwell solver can subsequently be used to calculate the fluorescence intensities in full analogy to the X-ray standing wave field obtained by the matrix formalism. Only the effective 1D integration for the layer system has to be replaced by a 2D integration of the finite elements, taking into account the local excitation conditions. We will show that this approach is capable of reconstructing the geometric line shape of a structured surface with high elemental sensitivity. This combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.