Cross Sections for Electron Collisions with NF$_3$

TL;DR

This paper compiles and reviews cross section data for electron collisions with NF$_3$ molecules, providing recommended values for various collision processes based on literature up to 2016.

Contribution

It offers a comprehensive and updated compilation of cross section data for electron-NF$_3$ interactions, serving as a valuable reference for researchers.

Findings

Recommended cross section values for multiple collision processes.

Extensive literature survey up to 2016.

Data compilation aids modeling and simulation efforts.

Abstract

Cross section data are compiled from the literature for electron collisions with nitrogen trifluoride (NF$_3$) molecules. Cross sections are collected and reviewed for total scattering, elastic scattering, momentum transfer, excitations of rotational and vibrational states, dissociation, ionization, and dissociative attachment. For each of these processes, the recommended values of the cross sections are presented. The literature has been surveyed up to the end of 2016.